Multipurpose chamber for TEM/SEM sample and holder cleaning, TEM specimen holder vacuum storage, and SEM/FIB chamber cleaning


The multipurposechamber can be configured for different applications with external accessories such as EM-KLEEN remote plasma source and/or TEM specimen holder adapters. EM-KLEEN remote plasma source can be used to generate oxygen & hydrogenradicals using air, O2, or H2 gas for sample cleaning and surface activation. If the chamber is equipped with TEM specimen holder adapters, it can accept atotal of six TEM specimen holders from Thermo-Fisher, JEOL, and Hitachi. Then it can be used as a vacuum storage station. Of course, the EM-KLEEN plasma source can also be taken out and installed on an SEM, TEM, FIB, XPS, and other high vacuum chambers

TEM/SEM sample/specimen holder cleaning and storage solution

Configuration 1: EM-KLEEN plasma source on the multipurpose vacuum chamber


Applications: EM-KLEEN remote plasma source generates oxygen or hydrogen radicals using room air, oxygen, or Hydrogen as the process gas. Sample can be loaded from the top glass door. EM-KLEEN plasma source can also be taken out and installed on a separate SEM, FIB & XPS system chamber for chamber cleaning

Remote plasma source on a vacuum chamber Remote plasma source on a vacuum chamber with plasma on

Configuration 2: EM-KLEEN plasma source and TEM specimen holder adapters on the multipurpose chamber.


Applications: EM-KLEEN remote plasma source for SEM & TEM sample cleaning. Sample can be loaded through the top glass door or inserted through the TEM specimen holder. EM-KLEEN plasma source can also be taken out and installed on an SEM, FIB & XPS system for chamber cleaning. Chamber can be pumped by an oil-free dry scroll pump or a turbopump station.

TEM/SEM sample/specimen holder cleaning and storage solution

Configuration 3: Multipurpoe chamber as TEM specimen holder vacuum storage station


TEM specimen holder adapters installed on the chamber as the specimen & holder vacuum storage chamber. The chamber can be pumped by an oil-free dry scroll pump or a turbopump sta on. Support a total of six TEM specimen holders. It can be configured to support JEOL, Hitachi & Thermo-Fisher TEM specimen holders.

TEM/SEM sample/specimen holder storage solution