The multipurposechamber can be configured for different applications with external accessories such as EM-KLEEN remote plasma source and/or TEM specimen holder adapters. EM-KLEEN remote plasma source can be used to generate oxygen & hydrogenradicals using air, O2, or H2 gas for sample cleaning and surface activation. If the chamber is equipped with TEM specimen holder adapters, it can accept atotal of six TEM specimen holders from Thermo-Fisher, JEOL, and Hitachi. Then it can be used as a vacuum storage station. Of course, the EM-KLEEN plasma source can also be taken out and installed on an SEM, TEM, FIB, XPS, and other high vacuum chambers
Applications: EM-KLEEN remote plasma source generates oxygen or hydrogen radicals using room air, oxygen, or Hydrogen as the process gas. Sample can be loaded from the top glass door. EM-KLEEN plasma source can also be taken out and installed on a separate SEM, FIB & XPS system chamber for chamber cleaning
Applications: EM-KLEEN remote plasma source for SEM & TEM sample cleaning. Sample can be loaded through the top glass door or inserted through the TEM specimen holder. EM-KLEEN plasma source can also be taken out and installed on an SEM, FIB & XPS system for chamber cleaning. Chamber can be pumped by an oil-free dry scroll pump or a turbopump station.
TEM specimen holder adapters installed on the chamber as the specimen & holder vacuum storage chamber. The chamber can be pumped by an oil-free dry scroll pump or a turbopump sta on. Support a total of six TEM specimen holders. It can be configured to support JEOL, Hitachi & Thermo-Fisher TEM specimen holders.