Front view of three-port gas mixer
SEMI-KLEEN or EM-KLEEN series remote plasma source can only accept one gas input. For some research projects, user may need to mix multiple process gases for SEMI-KLEEN or EM-KLEEN remote plasma source. Three-port gas mixer listed here integrates up to three mass flow controlled gas input ports, one venting/bypass pumping port and one mixed gas output port. The gas output port should be connected to gas input port on the SEMI-KLEEN or EM-KLEEN remote plasma cleaners. Venting/bypass pumping port offers a high conductance pumping route to evacuate gas tubing if high purity gas delivery is required.
Backside of the gas mixer.